Deterministic Thermal Sculpting of Large‐Scale 2D Semiconductor Nanocircuits
نویسندگان
چکیده
2D transition metal dichalcogenide semiconductor (TMDs) nanocircuits are deterministically engineered over large-scale substrates. This original additive nanolithography approach combines large-area physical growth of TMDs layer with high resolution thermal-scanning probe lithography, to reshape the ultra-thin semiconducting layers at nanoscale level. The nanofabrication few-layer MoS2 nanostructures controlled thickness, grown in 2H-semiconducting phase, is demonstrated as shown by their Raman vibrational fingerprints and optoelectronic response. electronic signatures locally identified Kelvin force microscopy providing chemical compositional contrast nanometer scale. Finally, potential role building blocks deterministic interconnections high-resolution local conductivity maps showing competitive transport properties these nanolayers. work thus provides a powerful scalable nano-interconnects van der Waals heterostructures, integration real-world ultra-compact photonic nanodevices.
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ژورنال
عنوان ژورنال: Advanced Materials Interfaces
سال: 2022
ISSN: ['2196-7350']
DOI: https://doi.org/10.1002/admi.202201408